Three-Dimensional Simulation of the Fluid Flow and Heat Transfer in a Czochralski Melt

Computational Fluid Dynamics

Universität Erlangen-Nürnberg
Lehrstuhl für Strömungsmechanik

Silicon (Si) single crystals and other electronic semiconductormaterials play an important role for the fabrication of electronicdevices. Over decades, the Czochralski (Cz) method has virtuallydominated the entire production of Si wafers for the micro electronicsindustry. Fundamentally, the Czochralski process consists of freezingmaterial from a molten pool contained in a quartz crucible onto theend of a single-crystal